We offer the following field proven upgrades
Fusion throttle valve upgrade set
| OEM | Axcelis Fusion | |
| Platform | Gemini | |
| Chamber | MCU, GPL, GES, GPL-IP, GES-IP | |
| Replacing OEM part no: | 285481 | |
| Size | DN50 | |
| Replacing OPM part no: | MKS 153D-12018 |
Mattson Aspen throttle valve upgrade set
| OEM | Mattson | |
| Platform | ASPEN, ASPEN II | |
| Chamber | Stripper, Asher | |
| Replacing OEM part no: | 914-11001-00 & 467-02643-00 | |
| Size | DN50 | |
| Replacing OPM part no: | Tylan MDV-018 throttle valve & ACX 120103 controller plus ACX powersupply |
LAM 4420XL throttle valve upgrade set
| OEM | LAM® Research | |
| Platform | Rainbow | |
| Chamber | 4420XL, 4426XL, 4428XL | |
| Replacing OEM part no: | 839-013901-001 & 796-006238-012 | |
| Size | DN100 | |
| Replacing OPM part no: | Tylan MDVX-100BS11 throttle valve & AC2 controller AC-2S12 |
LAM 4420 throttle valve upgrade set
| OEM | LAM® Research | |
| Platform | Rainbow | |
| Chamber | 4400, 4420, 4426, 4428 | |
| Replacing OEM part no: | 853-012541-002 & 796-006238-001 | |
| Size | DN80 | |
| Replacing OPM part no: | Tylan MDVX-018S01 throttle valve & AC2 controller AC-2S |
LAM 4520 ISO throttle valve upgrade set
| OEM | LAM® Research | |
| Platform | Rainbow | |
| Chamber | 4520I, 4520 ISO, ELL, PLL | |
| Replacing OEM part no: | 853-021648-001 & 796-006238-001 | |
| Size | DN40 | |
| Replacing OPM part no: | Tylan MDVX-015S11 throttle valve & AC2 controller AC-2S |
LAM 4520 throttle valve upgrade set
| OEM | LAM® Research | |
| Platform | Rainbow, Alliance | |
| Chamber | 4500, 4520, 4526, 4528 | |
| Replacing OEM part no: | 839-013901-001 & 796-006238-012 | |
| Size | DN100 | |
| Replacing OPM part no: | Tylan MDVX-100BS11 throttle valve & AC2 controller AC-2S12 |
LAM 9600 TCP DSQ throttle valve upgrade set
| OEM | LAM® Research | |
| Platform | TCP 9600 | |
| Chamber | DSQ , µwave, strip, PLL on the TCP 9600 | |
| Replacing OEM part no: | 796-006057-001 & 796-006238-001 | |
| Size | DN50 | |
| Replacing OPM part no: | Tylan DDVX-018 throttle valve & AC2 controller AC-2S |
LAM 9600 PTX strip sealing thottle valve upgrade set
| OEM | LAM® Research | |
| Platform | Alliance A6 | |
| Chamber | μwave, strip for 9600 PTX | |
| Replacing OEM part no: | 796-094595-222 & 796-093088-002 | |
| Size | DN100 | |
| Replacing OPM part no: | VAT 64040-PE52-1009 valve & PM5 controller 641PM-36PM-1001 |
LAM Rainbow, Alliance Innerdoor actuator and gate
| OEM | LAM® Research | |
| Platform | Rainbow, Alliance, TCP | |
| Chamber | ALL | |
| Replacing OEM part no: | 853-012200-002 / 853-012200-004 / 853-012875-001 / 853-012875-002 / 853-012261-001 |
Lange Heggen 42
5835 CA Beugen
The Netherlands
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