Oxide Etch ESC Rework:

  • Cost effective rework (repair) of OEM ESC

  • Save at least 50% on your Oxide ESC costs
  • Geometrical dimensions are brought back to OEM specifications

  • No change of material, no process shift, no major qualification
  • Long term expierence,  long term customer relations

  • High number of ESC's succesfully reworked

  • Feedback if we find the ESC is not the problem but your tool

What TPO- engineering offers you:

  • Rework possibilities for the following OEM part no:
    839-440462-508    839-019090-325    839-800327-324
    231-440462-508    839-019090-328    839-800327-325
    839-440462-308    839-800327-206    839-800327-385
    839-440462-306    839-800327-215    839-800327-390
    839-440562-306    839-800327-226    839-800327-400
    715-800327-402    839-800327-265    839-800327-403
    719-800327-315    839-800327-302    839-800327-410
    719-800327-385    839-800327-305    839-800327-412
    839-019090-223    839-800327-312    839-800327-418
    839-019090-225    839-800327-315    839-800327-423
    839-019090-324    839-800327-323    839-800327-432

  • A effective way to reduce the cost of ownership for LAM Research® oxide etchers
  • A significant price benefit

  • A free reworked ESC for evaluation

  • All reworked ESC are tested in OEM equipment, according OPM specifications.

  • Highly experienced engineers with all technical knowledge of LAM Research®  equipment and ESC’s.

Lange Heggen 42

5835 CA Beugen

The Netherlands 

Our end-users: