Problems OEM door:
- Poor adjustable overlock
- No equal pressure on the O-ring
- Expensive O-rings needed to compensate
- Early leakage
- Extra polymer building in metal etcher
- High wear, overhaul every 3 years (200,000 to 300,000 wafers)
- High total overhaul costs. (Either internal manpower and parts or external refurbishment costs)
- To many parts that can fail, and which have to be adjusted.
TPO reengineered together with the leader in vacuum valves, an improved wafer transfer valve
- Use of existing proven door assy, (10 years in the field)
- Plug and play replacement assy for Rainbow, TCP and Alliance.
- Low wear, overhaul only every every 10 to 15 years. (2,000,000 to 3,000,000 wafers)
- Constant O-ring pressure > No leakage
- High uptime & low maintenance cost.
- Exclusively available at TPO-engineering or its partners
Lange Heggen 42
5835 CA Beugen
The Netherlands
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