Older pressure regulation valves from Tylan General Valve , Millipore Valve , Mykrolis , Celerity, Nor-cal, MKS and even VAT valves all suffer from poor pressure regulation.
- The old valves regulates very slow, which cost a lot of throughput and process gas.
- The old valves have limited number of steps; therefore it can hardly regulate higher pressures at low flow.
- The old valve are not heated so they quickly contaminated which causes the throttle to become loose or to stuck, and therefore prone to fail.
Faster and better pressure regulation > Gains higher throughput & Eliminates pressure aborts
TPO reengineered together with the leader in vacuum valves, plug and play pressure regulate solutions.
- Up to >>>80% faster and better pressure regulation for a more stable process
- Eliminates process and cross-over aborts
- Gain higher throughput up to >>>20% depending on tool and recipe
- Uptime improvement
- Yield improvement at 9600PTX uwave were aborts can cause corrosion.
- ntegrated heating when polymer building needs to be prevented.
- Comes as a plug and play kit with procedure for easy installation
- Proven concept, Number of tools upgraded in the field : >>>120
- Exclusively available at TPO-engineering or its partners
Lange Heggen 42
5835 CA Beugen
The Netherlands
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